Optical trap assisted nanopatterning
The OTAN technique, developed by our group, brings laser direct-write a step smaller. This probe-based near field technique uses a microlens that is optically trapped above the substrate to create arbitrary sub-wavelength features on a surface. The key features include easy parallelization and the ability to process rough substrates.
Featured publications
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Generation of Nanoscale Anticounterfeiting Patterns on Silicon by Optical Trap Assisted Nanopatterning
T.-H. Chen, Y.-C. Tsai, R. Fardel, C. B. Arnold, J. Laser. Appl. (2017) uses optical trap assisted nanopatterning to create unique security markings by taking advantage of statistical fluctuations when generating nanoscale features within the pattern.
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Non-spherical particles for optical trap assisted nanopatterning
Y-C Tsai, R Fardel, M M Panczyk, E M Furst and C B Arnold, IOP Nanotech. (2013) studies the optical near-field effects of OTAN using non-spherical polystyrene particles.
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Multiphoton polymerization using OTAN
K.-H. Leitz, Y.-C. Tsai, F. Flad, E. Schaffer, U. Quentin, I. Alexeev, R. Fardel, C. B. Arnold, M. Schmidt, Appl. Phys. Lett. (2013) uses a combination of multiphoton polymerization and OTAN for additive manufacturing of structures with nanometer resolution.
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Microbead dynamics in OTAN
R. Fardel, Y.-C. Tsai, and C. B. Arnold, Appl. Phys. A (2012) uses high-speed microscopy to show that gas bubbles can be formed from the laser pulse during Optical Trap Assisted Nanopatterning (OTAN) resulting in temporary bead displacement during operation.
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OTAN multiphoton absorption polymerization
Y.-C. Tsai, K.-H. Leitz, R. Fardel, M. Schmidt, and C. B. Arnold, Physics Procedia (2012) combines the strengths of multiphoton absorption and near field effects using optical trap assisted nanopatterning (OTAN) to generate sub 100 nm features.
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Laser direct-write parallel nanopatterns on rough surfaces
Y.-C. Tsai et. al., IOP Nanotech. (2012) generates parallel nanofeatures on rough surfaces with vertical steps more than 1.5 μm and feature variation smaller than 4% using OTAN. A Brownian motion model is used to describe and predict the lateral positional accuracy of the system. | Full text | View at publisher
Array-based optical nanolithography using laser trapped microlenses
E. Mcleod & C.B. Arnold, Optics Express (2009) modifies the OTAN technique to include an array of optically trapped nanospheres capable of fabricating multiple identical nanoscale (~100 nm) structures in parallel using 355 nm light. Feature size uniformity and relative positioning accuracy better than 15 nm was demonstrated. | Full text | View at publisher
Subwavelength direct-write nanopatterning using optically trapped microspheres
E. Mcleod & C.B. Arnold, Nature Nanotechnology (2008) presents a novel laser direct write nanopatterning technique using an optically trapped microsphere as an objective lens. This method was used to create arbitrary patterns with feature sizes of ~100 nm (less than a third of the processing wavelength) and a positioning accuracy better than 40 nm in aqueous and chemical environments. Submicron spacing is maintained between the microsphere and the substrate without active feedback control. | Full text | View at publisher
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All OTAN publications
- Y. Tsai, R. Fardel, M.M. Panczyk, E. M. Furst, and C.B. Arnold, “Non-spherical particles for optical trap assisted nanopatterning,” Nanotech., 24, 375303 (2013) | Full text | View at publisher
- K.-H. Leitz, Y.-C. Tsai, F. Flad, E. Schaffer, U. Quentin, I. Alexeev, R. Fardel, C. B. Arnold, and M. Schmidt, “Multiphoton polymerization using optical trap assisted nanopatterning”, Appl. Phys. Lett, 102, 243108 (2013). | Full text | View at publisher
- R. Fardel, Y.-C. Tsai, and C. B. Arnold, “Microbead dynamics in optical trap assisted nanopatterning," Applied Physics A 112, 23–28 (2013) | Full text | View at publisher
- Y.Tsai, K-H. Leitz, R. Fardel, M.Schmidt, and C. B. Arnold, “Generating nanostructures with multiphoton absorption polymerization using optical trap assisted nanopatterning,” Physics Procedia, 39, 669-673 (2012) | Full text | View at publisher
- Y.-C. Tsai, K.-H. Leitz, R. Fardel, A. Otto, M. Schmidt, and C. B. Arnold, "Parallel optical trap assisted nanopatterning on rough surfaces," IOP Nanotech., 23, 165304 (2012)| Full text | View at publisher
- Y.-C. Tsai, R. Fardel, and C. B. Arnold, “Nanopatterning on rough surfaces using optically trapped microspheres,” Appl. Phys. Lett. 98, 233110 (2011) | Full text | View at publisher
- R. Fardel, Y. Tsai, and C. B. Arnold, “Self-positioning effects in optical trap assisted nanopatterning”, Proceedings of 2011 NSF Engineering Research and Innovation Conference, (2011) (non-referreed meeting paper)
- Y. Tsai, R. Fardel, and C. B. Arnold, “Generating submicron features on rough surfaces using optical trap assisted nanopatterning” AIP Proceedings 1278, 457-464 (2010) | Full text | View at publisher
- R. Fardel, E. McLeod, Y. Tsai, and C. B. Arnold, “Nanoscale ablation through optically trapped microspheres” Appl. Phys. A. 101, 41-46 (2010) | Full text | View at publisher
- E. Mcleod and C. B. Arnold, “Array-based optical nanolithography using laser trapped microlenses,” Optics Express, 17, 3640-3650 (2009) | Full text | View at publisher
- E. McLeod and C. B. Arnold, “Subwavelength direct-write nanopatterning using optically trapped microspheres,” Nature Nanotechnology, 3, 413-417(2008) | Full text | View at publisher